Nano Patterns

Product Group:

4" Si-Master Patterns

Code:

A040-031

Description:

4" Si-Master, nano-patterns > 90nm

Features:

• E-beam lithography based onto the 4" Si-wafer process
• Realisation of 4 different nano-structures of 3x3mm2 to max. 5x5mm2
• Handling of the whole 4"-Si-wafer process including Teflon-coating and chip-cutting to single 15x15mm2 master chips, the chips fit to the µ-CP2.1 casting station